Cover Image

Reliability, testing, and characterization of MEMS/MOEMS.

Saved in:

Bibliographic Details
Online Access:	Request a PDF (UCB only)
Corporate Authors:	Society of Photo-Optical Instrumentation Engineers, Semiconductor Equipment and Materials International, SPIE Digital Library
Format:	Serial
Language:	English
Published:	Bellingham, Wash. : SPIE, ©2001-
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 4558. Proceedings of SPIE--the International Society for Optical Engineering ; v. 4980. Proceedings of SPIE--the International Society for Optical Engineering ; v. 5343.
Subjects:	Microelectromechanical systems > Reliability > Congresses. Microelectromechanical systems > Testing > Congresses.

Internet

Request a PDF (UCB only)

Closed Stacks - Engineering Math & Physics Library

Holdings details from Closed Stacks - Engineering Math & Physics Library
Call Number:	TK7875 .R45
Volume Holdings:	v.1 (2001)-
TK7875 .R45 (1st 2001)	Available Place a Hold
TK7875 .R45 (2nd 2003)	Available Place a Hold
TK7875 .R45 (3rd 2004)	Available Place a Hold

Online

Holdings details from Online
Call Number:	Online
Notes:	Vols. for 2001- are available online and are cataloged as monograph