Selected papers on resolution enhancement techniques in optical lithography / editor, F.M. Schellenberg.

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Bibliographic Details
Other Authors:	Schellenberg, F. M., 1959-
Other title:	Resolution enhancement techniques in optical lithography.
Format:	Book
Language:	English German Japanese
Published:	Bellingham, Wash., USA : SPIE Press, ©2004.
Series:	SPIE milestone series ; v. MS 178.
Subjects:	Integrated circuits > Design and construction. Microlithography. Photolithography. Semiconductors > Etching.

Closed Stacks - Engineering Math & Physics Library - Stacks

Holdings details from Closed Stacks - Engineering Math & Physics Library - Stacks
Call Number:	TK7874 .S4147 2004
TK7874 .S4147 2004	Available Place a Hold