Selected papers on resolution enhancement techniques in optical lithography / editor, F.M. Schellenberg.
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| Other Authors: | |
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| Other title: | Resolution enhancement techniques in optical lithography. |
| Format: | Book |
| Language: | English German Japanese |
| Published: |
Bellingham, Wash., USA :
SPIE Press,
©2004.
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| Series: | SPIE milestone series ;
v. MS 178. |
| Subjects: |
| Item Description: | Errata slip inserted. |
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| Physical Description: | xx, 875 pages : illustrations ; 29 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0819451665 |
| Language: | Contributions in English and German and Japanese with translations to English. |