Influence of substrate temperature and hydrogen dilution ration on the properties of nanocrystalline silicon thin films grown by hot-wire chemical vapor deposition [electronic resource] : preprint / H.R. Moutinho ... [and others]
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Format: | Government Document Electronic eBook |
Language: | English |
Published: |
Golden, Colo. :
National Renewable Energy Laboratory,
[2003]
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Series: | Conference paper (National Renewable Energy Laboratory (U.S.)) ;
NREL/CP-520-33929. |
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Internet
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Call Number: |
E 9.17:NREL/CP-520-33929
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E 9.17:NREL/CP-520-33929 | Available |