Influence of substrate temperature and hydrogen dilution ration on the properties of nanocrystalline silicon thin films grown by hot-wire chemical vapor deposition [electronic resource] : preprint / H.R. Moutinho ... [and others]

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Corporate Author: National Renewable Energy Laboratory (U.S.)
Other Authors: Moutinho, Helio R.
Format: Government Document Electronic eBook
Language:English
Published: Golden, Colo. : National Renewable Energy Laboratory, [2003]
Series:Conference paper (National Renewable Energy Laboratory (U.S.)) ; NREL/CP-520-33929.
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Call Number: E 9.17:NREL/CP-520-33929
E 9.17:NREL/CP-520-33929 Available