Introduction to microfabrication / Sami Franssila.

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Bibliographic Details
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Main Author:	Franssila, Sami
Format:	Book
Language:	English
Published:	Chichester, West Sussex, England ; Hoboken, NJ : J. Wiley, ©2004.
Subjects:	Microelectromechanical systems. Electronic apparatus and appliances. Microfabrication.

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Holdings details from Closed Stacks - Engineering Math & Physics Library - Stacks
Call Number:	TK7875 .F73 2004
TK7875 .F73 2004	Available Place a Hold