Smart structures and materials 1998. Smart electronics and MEMS [electronic resource] : 2-4 March 1998, San Diego, California / Vijay K. Varadan [and others], chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering [and others] ; cooperating organizations, Air Force Research Laboratory [and others]

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Bibliographic Details
Online Access:	Full Text (via SPIE Digital Library)
Corporate Authors:	Society of Photo-Optical Instrumentation Engineers, Air Force Research Laboratory (Wright-Patterson Air Force Base, Ohio), SPIE Digital Library
Other Authors:	Varadan, V. K., 1943-
Other title:	Smart electronics and MEMS.
Format:	Electronic eBook
Language:	English
Published:	Bellingham, Wash., USA : SPIE, ©1998.
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 3328.
Subjects:	Microelectronics > Materials > Congresses. Smart materials > Congresses. Microelectromechanical systems > Congresses. Actuators > Congresses. Actuators. Microelectromechanical systems. Microelectronics > Materials. Smart materials. Conference papers and proceedings.

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Holdings details from Online
Call Number:	TK7874 .S58 1998
TK7874 .S58 1998	Available