Electronics and structures for MEMS [electronic resource] : 27-29 October 1999, Royal Pines Resort, Queensland, Australia / Neil W. Bergmann, Olaf Reinhold, Norman C. Tien, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), [and] Queensland Government State Development (Australia) ; cooperating organizations, LeGUMES--the Griffith University Microelectronics Engineering Society (Australia) [and others]

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Bibliographic Details
Online Access:	Full Text (via SPIE Digital Library)
Corporate Authors:	Society of Photo-Optical Instrumentation Engineers, Institution of Radio and Electronics Engineers, Australia, Queensland. Government State Development, Griffith University Microelectronics Engineering Society, SPIE Digital Library
Other Authors:	Bergmann, Neil W., Reinhold, Olaf, Tien, Norman C.
Format:	Electronic eBook
Language:	English
Published:	Bellingham, Wash., USA : SPIE, ©1999.
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 3891.
Subjects:	Microelectromechanical systems > Congresses. Smart structures > Congresses. Microelectronics > Congresses. Microelectromechanical systems. Microelectronics. Smart structures. Conference papers and proceedings.

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Call Number:	TK7875 .E43 1999
TK7875 .E43 1999	Available