Surface characterization for computer disks, wafers, and flat panel displays [electronic resource] : 28 January 1999, San Jose, California / John C. Stover, chair/editor.
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Format: | Electronic eBook |
Language: | English |
Published: |
Bellingham, Wash., USA :
SPIE,
©1999.
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Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 3619. |
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Internet
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Call Number: |
TK7887.8.D37 S87 1999
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TK7887.8.D37 S87 1999 | Available |