Engineering thin films with ion beams, nanoscale diagnostics, and molecular manufacturing [electronic resource] : 30-31 July 2001, San Diego, USA / Émile J. Knystautas, Wiley P. Kirk, Valerie Browning, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.

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Bibliographic Details
Online Access: Full Text (via SPIE Digital Library)
Corporate Authors: Society of Photo-Optical Instrumentation Engineers, SPIE Digital Library
Other Authors: Knystautas, Emile J., Kirk, Wiley P., Browning, Valerie M.
Format: Electronic eBook
Language:English
Published: Bellingham, Wash., USA : SPIE, ©2001.
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 4468.
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Call Number: TA418.9.T45 E54 2001
TA418.9.T45 E54 2001 Available