MEMS components and applications for industry, automobiles, aerospace, and communication [electronic resource] : 22-23 October 2001, San Francisco, USA / Henry Helvajian, Siegfried W. Janson, Franz Lärmer, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by DARPA--Defense Advanced Research Projects Agency (USA) ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International (USA) [and others]

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Bibliographic Details
Online Access:	Full Text (via SPIE Digital Library)
Corporate Authors:	Society of Photo-Optical Instrumentation Engineers, United States. Defense Advanced Research Projects Agency, Semiconductor Equipment and Materials International, SPIE Digital Library
Other Authors:	Helvajian, Henry, Janson, Siegfried W., Lärmer, Franz
Format:	Electronic eBook
Language:	English
Published:	Bellingham, Wash., USA : SPIE, ©2001.
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 4559.
Subjects:	Microelectromechanical systems > Design and construction > Congresses. Microelectromechanical systems > Industrial applications > Congresses. Manufacturing processes > Congresses.

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Call Number:	TK7875 .M388 2001
TK7875 .M388 2001	Available