Smart structures and materials, 2001. Smart electronics and MEMS [electronic resource] : 5-7 March 2001, Newport Beach, USA / Vijay K. Varadan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cosponsored by ASME--American Society for Mechanical Engineers [and others] ; cooperating organizations, Air Force Research Laboratory [and others]

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Bibliographic Details
Online Access:	Full Text (via SPIE Digital Library)
Corporate Authors:	Society of Photo-Optical Instrumentation Engineers, American Society of Mechanical Engineers, Air Force Research Laboratory (Wright-Patterson Air Force Base, Ohio), SPIE Digital Library
Other Authors:	Varadan, V. K., 1943-
Other title:	Smart electronics and MEMS.
Format:	Electronic eBook
Language:	English
Published:	Bellingham, Wash. : SPIE, ©2001.
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 4334.
Subjects:	Microelectronics > Materials > Congresses. Smart materials > Congresses. Microelectromechanical systems > Congresses. Actuators > Congresses. Actuators. Microelectromechanical systems. Microelectronics > Materials. Smart materials. Conference papers and proceedings.

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Call Number:	TK7874 .S593 2001
TK7874 .S593 2001	Available