19th European Conference on Mask Technology for Integrated Circuits and Microcomponents [electronic resource] : 13-15 January, 2003, Sonthofen, Germany / Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI--Society Microelectronics, Micro- and Precision Engineering (GMM) [and others] ; cooperating oganizations, SEMI Europe [and others] ; published by SPIE--The International Society for Optical Engineering.
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| Online Access: |
Full Text (via SPIE Digital Library) |
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| Corporate Authors: | , , , , |
| Other Authors: | |
| Other title: | Mask technology for integrated circuits and microcomponents. |
| Format: | Electronic Conference Proceeding eBook |
| Language: | English |
| Published: |
Bellingham, Wash. :
SPIE,
©2003.
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| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 5148. |
| Subjects: |
Internet
Full Text (via SPIE Digital Library)Online
| Call Number: |
TK7872.M3 E97 2003
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| TK7872.M3 E97 2003 | Available |