Advances in mirror technology for X-ray, EUV lithography, laser and other applications [electronic resource] : 7-8 August 2003, San Diego, California, USA / Ali M. Khounsary, Udo Dinger, Kazuya Ota, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.

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Bibliographic Details
Online Access:	Full Text (via SPIE Digital Library)
Corporate Authors:	Society of Photo-Optical Instrumentation Engineers, SPIE Digital Library
Other Authors:	Khounsary, Ali M., Dinger, Udo, Ota, Kazuya
Format:	Electronic eBook
Language:	English
Published:	Bellingham, Wash., USA : SPIE, ©2004.
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 5193.
Subjects:	Mirrors > Design and construction > Congresses. Lasers > Mirrors > Design and construction > Congresses. Optical coatings > Congresses. Optical radiometry > Congresses. Lasers > Mirrors > Design and construction. Mirrors > Design and construction. Optical coatings. Optical radiometry. Conference papers and proceedings.

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Call Number:	QC385.2.D47 A39 2004
QC385.2.D47 A39 2004	Available