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|a GWRE
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| 050 |
1 |
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|a QC385.2.D47
|b A39 2004
|
| 245 |
0 |
0 |
|a Advances in mirror technology for X-ray, EUV lithography, laser and other applications
|h [electronic resource] :
|b 7-8 August 2003, San Diego, California, USA /
|c Ali M. Khounsary, Udo Dinger, Kazuya Ota, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
|
| 260 |
|
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|a Bellingham, Wash., USA :
|b SPIE,
|c ©2004.
|
| 300 |
|
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|a ix, 222 pages :
|b illustrations (some color) ;
|c 28 cm.
|
| 336 |
|
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|a text
|b txt
|2 rdacontent.
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| 337 |
|
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|a computer
|b c
|2 rdamedia.
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| 338 |
|
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|a online resource
|b cr
|2 rdacarrier.
|
| 490 |
1 |
|
|a SPIE proceedings series,
|x 0277-786X ;
|v v. 5193.
|
| 504 |
|
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|a Includes bibliographical references and index.
|
| 650 |
|
0 |
|a Mirrors
|x Design and construction
|v Congresses.
|
| 650 |
|
0 |
|a Lasers
|x Mirrors
|x Design and construction
|v Congresses.
|
| 650 |
|
0 |
|a Optical coatings
|v Congresses.
|0 http://id.loc.gov/authorities/subjects/sh2010104467.
|
| 650 |
|
0 |
|a Optical radiometry
|v Congresses.
|0 http://id.loc.gov/authorities/subjects/sh2010104475.
|
| 650 |
|
7 |
|a Lasers
|x Mirrors
|x Design and construction.
|2 fast
|0 (OCoLC)fst00992861.
|
| 650 |
|
7 |
|a Mirrors
|x Design and construction.
|2 fast
|0 (OCoLC)fst01023583.
|
| 650 |
|
7 |
|a Optical coatings.
|2 fast
|0 (OCoLC)fst01046651.
|
| 650 |
|
7 |
|a Optical radiometry.
|2 fast
|0 (OCoLC)fst01046798.
|
| 655 |
|
7 |
|a Conference papers and proceedings.
|2 fast
|0 (OCoLC)fst01423772.
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| 700 |
1 |
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|a Khounsary, Ali M.
|0 http://id.loc.gov/authorities/names/nr93026952
|1 http://isni.org/isni/0000000122134331.
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| 700 |
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|a Dinger, Udo.
|0 http://id.loc.gov/authorities/names/no2009147172
|1 http://isni.org/isni/0000000071270471.
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| 700 |
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|a Ota, Kazuya.
|0 http://id.loc.gov/authorities/names/no2009147178
|1 http://isni.org/isni/0000000071110937.
|
| 710 |
2 |
|
|a Society of Photo-Optical Instrumentation Engineers.
|0 http://id.loc.gov/authorities/names/n78088934
|1 http://isni.org/isni/0000000122965856.
|
| 710 |
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|
|a SPIE Digital Library.
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| 776 |
1 |
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|c Original
|z 0819450669
|w (OCoLC)54354588.
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| 856 |
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|u https://colorado.idm.oclc.org/login?url=http://proceedings.spiedigitallibrary.org/volume.aspx?volume=5193
|z Full Text (via SPIE Digital Library)
|
| 830 |
|
0 |
|a Proceedings of SPIE--the International Society for Optical Engineering ;
|v v. 5193.
|0 http://id.loc.gov/authorities/names/n42030541.
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