Device and process technologies for MEMS, microelectronics, and photonics III [electronic resource] : 10-12 December 2003, Perth, Australia / Jung-Chih Chiao [and others], chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cosponsored by the University of Western Australia (Australia) [and] Defence Science and Technology (Australia)

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Bibliographic Details
Online Access:	Full Text (via SPIE Digital Library)
Corporate Authors:	Society of Photo-Optical Instrumentation Engineers, University of Western Australia, Defence Science and Technology Organisation (Australia)
Other Authors:	Chiao, Jung-Chih (Editor)
Other title:	Device and process technologies for MEMS and microelectronics.
Format:	Electronic eBook
Language:	English
Published:	Bellingham, Wash., USA : SPIE, ©2004.
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 5276.
Subjects:	Microelectromechanical systems > Congresses. Photon detectors > Design and construction > Congresses. Photomechanical processes > Congresses. Photolithography > Congresses. Microelectromechanical systems. Photon detectors > Design and construction. Photomechanical processes. Photolithography. Conference proceedings.

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Call Number:	TK7875 .D49 2004
TK7875 .D49 2004	Available