Microelectronic structures and microelectromechanical devices for optical processing and multimedia applications [electronic resource] : 24 October, 1995, Austin, Texas / Wayne Bailey, M. Edward Motamedi, Fang-Chen Luo, chairs/editors ; sponsored by SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, SPIE--the International Society for Optical Engineering.

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Bibliographic Details
Online Access:	Full Text (via SPIE Digital Library)
Corporate Authors:	Semiconductor Equipment and Materials International, National Institute of Standards and Technology (U.S.), Society of Photo-Optical Instrumentation Engineers, SPIE Digital Library
Other Authors:	Bailey, Wayne E., Motamedi, M. Edward, Luo, Fang-Chen
Format:	Electronic eBook
Language:	English
Published:	Bellingham, Wash. : SPIE, ©1995.
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 2641.
Subjects:	Microelectronics > Congresses. Microelectromechanical systems > Congresses. Optoelectronics > Congresses. Microelectromechanical systems. Microelectronics. Optoelectronics. Conference papers and proceedings.

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Call Number:	TK7874 .M474 1995
TK7874 .M474 1995	Available