Micromachining and microfabrication process technology III [electronic resource] : 29-30 September, 1997, Austin, Texas / Shih-Chia Chang, Stella W. Pang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute of Standards and Technology ; cooperating organization, Solid State Technology.

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Bibliographic Details
Online Access:	Full Text (via SPIE Digital Library)
Corporate Authors:	Society of Photo-Optical Instrumentation Engineers, Semiconductor Equipment and Materials International, National Institute of Standards and Technology (U.S.)
Other Authors:	Pang, Stella W., Chang, Shih-Chia
Other title:	SPIE digital library.
Format:	Electronic eBook
Language:	English
Published:	Bellingham, Wash., USA : SPIE, ©1997.
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 3223.
Subjects:	Micromachining > Congresses. Microfabrication > Congresses. Electromechanical devices > Design and construction > Congresses. Electromechanical devices > Design and construction. Microfabrication. Micromachining. Conference papers and proceedings.

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Call Number:	QC176.8.M5 M43 1997
QC176.8.M5 M43 1997	Available