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|a Micromachining and microfabrication process technology III
|h [electronic resource] :
|b 29-30 September, 1997, Austin, Texas /
|c Shih-Chia Chang, Stella W. Pang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute of Standards and Technology ; cooperating organization, Solid State Technology.
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| 260 |
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|a Bellingham, Wash., USA :
|b SPIE,
|c ©1997.
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| 300 |
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|a 1 online resource (ix, 310 pages) :
|b illustrations.
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|a SPIE proceedings series,
|x 0277-786X ;
|v v. 3223.
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| 504 |
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|a Includes bibliographical references and index.
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| 650 |
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|a Micromachining
|v Congresses.
|0 http://id.loc.gov/authorities/subjects/sh2008107749.
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| 650 |
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|a Microfabrication
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|t Micromachining and microfabrication process technology III.
|d Bellingham, Wash., USA : SPIE, ©1997
|z 0819426555
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|v v. 3223.
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