Silicide technology for integrated circuits / edited by Lih J. Chen.

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Bibliographic Details
Corporate Author:	Institution of Electrical Engineers
Other Authors:	Chen, L. J.
Format:	Book
Language:	English
Published:	London : Institution of Electrical Engineers, ©2004.
Series:	EMIS processing series ; no. 5.
Subjects:	Silicides. Integrated circuits > Materials.

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Call Number:	TK7871.15.S55 S52 2004
TK7871.15.S55 S52 2004	Available Place a Hold