Optical characterization techniques for high-performance microelectronic device manufacturing [electronic resource] : 20 October 1994, Austin, Texas / Jagdish P. Mathur, John Lowell, Ray T. Chen, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.

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Bibliographic Details
Online Access:	Full Text (via SPIE Digital Library)
Corporate Authors:	Society of Photo-Optical Instrumentation Engineers, SPIE Digital Library
Other Authors:	Mathur, Jagdish P., Lowell, John, Chen, Ray T.
Format:	Electronic eBook
Language:	English
Published:	Bellingham, Wash., USA : SPIE, ©1994.
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 2337.
Subjects:	Semiconductors > Design and construction > Congresses. Integrated circuits > Design and construction > Congresses. Semiconductors > Testing > Optical methods > Congresses. Integrated circuits > Testing > Optical methods > Congresses. Optical pattern recognition > Congresses.

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Call Number:	TK7871.85 .O595 1994
TK7871.85 .O595 1994	Available