Optical characterization techniques for high-performance microelectronic device manufacturing [electronic resource] : 20 October 1994, Austin, Texas / Jagdish P. Mathur, John Lowell, Ray T. Chen, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Saved in:
| Online Access: |
Full Text (via SPIE Digital Library) |
|---|---|
| Corporate Authors: | , |
| Other Authors: | , , |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Bellingham, Wash., USA :
SPIE,
©1994.
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 2337. |
| Subjects: |
| Physical Description: | vii, 202 pages : illustrations ; 28 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and author index. |
| ISBN: | 0819416703 9780819416704 |