Advanced microlithography technologies [electronic resource] : 8-10 November 2004, Beijing, China / Yangyuan Wang, Jun-en Yao, Christopher J. Progler, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, COS--Chinese Optical Society ; cooperating organizations, Australian Optical Society [and others] ; supporting organizations, National Natural Science Foundation of China [and others]
Saved in:
| Online Access: |
Full Text (via SPIE Digital Library) |
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| Corporate Authors: | , , , , |
| Other Authors: | , , |
| Other title: | Microlithography technologies. |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Bellingham, Wash. :
SPIE,
©2005.
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| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 5645. |
| Subjects: |
Internet
Full Text (via SPIE Digital Library)Online
| Call Number: |
TK7872.M3 A38 2004
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| TK7872.M3 A38 2004 | Available |