Optical characterization techniques for high-performance microelectronic device manufacturing III [electronic resource] : 16-17 October 1996, Austin, Texas / Damon DeBusk, Ray T. Chen, chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and others]

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Bibliographic Details
Online Access:	Full Text (via SPIE Digital Library)
Corporate Authors:	Society of Photo-Optical Instrumentation Engineers, Semiconductor Equipment and Materials International, SPIE Digital Library
Other Authors:	DeBusk, Damon, Chen, Ray T.
Format:	Electronic eBook
Language:	English
Published:	Bellingham, Wash. : SPIE, ©1996.
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 2877.
Subjects:	Integrated circuits industry > Congresses. Manufacturing processes > Congresses. Semiconductors > Design and construction > Congresses. Integrated circuits > Design and construction > Congresses. Semiconductors > Testing > Optical methods > Congresses. Optical detectors > Congresses. Integrated circuits > Design and construction. Integrated circuits industry. Manufacturing processes. Optical detectors. Semiconductors > Design and construction. Semiconductors > Testing > Optical methods. Conference papers and proceedings.

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Call Number:	TK7836 .O69 1999
TK7836 .O69 1999	Available