|
|
|
|
| LEADER |
00000cam a2200000xa 4500 |
| 001 |
b3771215 |
| 003 |
CoU |
| 006 |
m o d |
| 007 |
cr ||||||||||| |
| 008 |
050519s1996 waua ob 101 0 eng d |
| 005 |
20230925220317.1 |
| 035 |
|
|
|a (OCoLC)spie60405862
|
| 035 |
|
|
|a (OCoLC)60405862
|
| 040 |
|
|
|a SPIED
|b eng
|c SPIED
|d OCLCQ
|d OCLCF
|d OCLCO
|d OCLCQ
|d OCL
|d OCLCO
|d OCLCQ
|
| 049 |
|
|
|a GWRE
|
| 050 |
|
4 |
|a TK7836
|b .O69 1999
|
| 245 |
0 |
0 |
|a Optical characterization techniques for high-performance microelectronic device manufacturing III
|h [electronic resource] :
|b 16-17 October 1996, Austin, Texas /
|c Damon DeBusk, Ray T. Chen, chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and others]
|
| 260 |
|
|
|a Bellingham, Wash. :
|b SPIE,
|c ©1996.
|
| 300 |
|
|
|a ix, 218 pages :
|b illustrations ;
|c 28 cm.
|
| 336 |
|
|
|a text
|b txt
|2 rdacontent.
|
| 337 |
|
|
|a computer
|b c
|2 rdamedia.
|
| 338 |
|
|
|a online resource
|b cr
|2 rdacarrier.
|
| 490 |
1 |
|
|a SPIE proceedings series,
|x 0277-786X ;
|v v. 2877.
|
| 504 |
|
|
|a Includes bibliographical references and index.
|
| 650 |
|
0 |
|a Integrated circuits industry
|v Congresses.
|
| 650 |
|
0 |
|a Manufacturing processes
|v Congresses.
|0 http://id.loc.gov/authorities/subjects/sh2008107338.
|
| 650 |
|
0 |
|a Semiconductors
|x Design and construction
|v Congresses.
|0 http://id.loc.gov/authorities/subjects/sh2008111516.
|
| 650 |
|
0 |
|a Integrated circuits
|x Design and construction
|v Congresses.
|0 http://id.loc.gov/authorities/subjects/sh2008104738.
|
| 650 |
|
0 |
|a Semiconductors
|x Testing
|x Optical methods
|v Congresses.
|
| 650 |
|
0 |
|a Optical detectors
|v Congresses.
|0 http://id.loc.gov/authorities/subjects/sh2008108670.
|
| 650 |
|
7 |
|a Integrated circuits
|x Design and construction.
|2 fast
|0 (OCoLC)fst00975545.
|
| 650 |
|
7 |
|a Integrated circuits industry.
|2 fast
|0 (OCoLC)fst00975626.
|
| 650 |
|
7 |
|a Manufacturing processes.
|2 fast
|0 (OCoLC)fst01008139.
|
| 650 |
|
7 |
|a Optical detectors.
|2 fast
|0 (OCoLC)fst01046682.
|
| 650 |
|
7 |
|a Semiconductors
|x Design and construction.
|2 fast
|0 (OCoLC)fst01112213.
|
| 650 |
|
7 |
|a Semiconductors
|x Testing
|x Optical methods.
|2 fast
|0 (OCoLC)fst01112263.
|
| 655 |
|
7 |
|a Conference papers and proceedings.
|2 fast
|0 (OCoLC)fst01423772.
|
| 700 |
1 |
|
|a DeBusk, Damon.
|0 http://id.loc.gov/authorities/names/nr96037346
|1 http://isni.org/isni/0000000384401663.
|
| 700 |
1 |
|
|a Chen, Ray T.
|0 http://id.loc.gov/authorities/names/nr94000655
|1 http://isni.org/isni/0000000050137874.
|
| 710 |
2 |
|
|a Society of Photo-Optical Instrumentation Engineers.
|0 http://id.loc.gov/authorities/names/n78088934
|1 http://isni.org/isni/0000000122965856.
|
| 710 |
2 |
|
|a Semiconductor Equipment and Materials International.
|0 http://id.loc.gov/authorities/names/n90682619.
|
| 710 |
2 |
|
|a SPIE Digital Library.
|
| 776 |
1 |
|
|c Original
|z 0819422754
|w (OCoLC)35664504.
|
| 856 |
4 |
0 |
|u https://colorado.idm.oclc.org/login?url=http://proceedings.spiedigitallibrary.org/volume.aspx?volume=2877
|z Full Text (via SPIE Digital Library)
|
| 830 |
|
0 |
|a Proceedings of SPIE--the International Society for Optical Engineering ;
|v v. 2877.
|0 http://id.loc.gov/authorities/names/n42030541.
|
| 907 |
|
|
|a .b37712159
|b 03-19-20
|c 10-14-05
|
| 915 |
|
|
|a I
|
| 998 |
|
|
|a web
|b 05-02-17
|c g
|d b
|e -
|f eng
|g wau
|h 0
|i 1
|
| 907 |
|
|
|a .b37712159
|b 07-26-19
|c 10-14-05
|
| 944 |
|
|
|a MARS - RDA ENRICHED
|
| 907 |
|
|
|a .b37712159
|b 07-06-17
|c 10-14-05
|
| 907 |
|
|
|a .b37712159
|b 05-23-17
|c 10-14-05
|
| 956 |
|
|
|a SPIE Digital Library
|
| 956 |
|
|
|b SPIE Digital Library
|
| 999 |
f |
f |
|i 9918fd6c-6216-5f83-a274-4176c2d57ead
|s da8af745-4783-5571-9504-890525e4ee69
|
| 952 |
f |
f |
|p Can circulate
|a University of Colorado Boulder
|b Online
|c Online
|d Online
|e TK7836 .O69 1999
|h Library of Congress classification
|i web
|n 1
|
