Micro- and nanotechnology sensors, systems and applications [electronic resource] : 15-17 April 2009, Orlando, Florida, United States / Thomas George, M. Saif Islam, Achyut K. Dutta, editors ; sponsored and publisher by SPIE.

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Bibliographic Details
Online Access:	Full Text (via SPIE Digital Library)
Corporate Author:	SPIE (Society)
Other Authors:	George, Thomas F., 1947-, Islam, M. Saiful, 1970-, Dutta, Achyut K.
Format:	Electronic eBook
Language:	English
Published:	Bellingham, Wash. : SPIE, 2009.
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 7318.
Subjects:	Nanoelectronics > Congresses. Nanoelectromechanical systems > Congresses. Microelectromechanical systems > Congresses. Nanophotonics > Congresses. Nanotechnology > Congresses. Microelectromechanical systems. Nanoelectromechanical systems. Nanoelectronics. Nanophotonics. Nanotechnology. Conference papers and proceedings.

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Call Number:	TK7874.84 .M537 2009e
TK7874.84 .M537 2009e	Available