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Fabrication of silicon field emission tips for vacuum microelectronics by KOH/Alcohol/Water etching [electronic resource]

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Bibliographic Details
Online Access:	Online Access
Corporate Author:	Lawrence Livermore National Laboratory (Researcher)
Format:	Government Document Electronic eBook
Language:	English
Published:	Washington, D.C : Oak Ridge, Tenn. : United States. Dept. of Energy. Office of the Assistant Secretary for Defense Programs ; distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy, 1990.
Subjects:	Kinetics. Semimetals. Organic Compounds. Fabrication. Mass Transfer. Alkenes. Surface Finishing. Silicon. Hydroxy Compounds. Alcohols. Ethylene. Field Emission. Chemical Reaction Kinetics. Water. Oxygen Compounds. Electrodes. Elements. Cathodes. Reaction Kinetics. Hydrocarbons. Hydrogen Compounds. Emission. Etching. Microelectronics. Engineering.

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Call Number:	E 1.99:ucrl-id-105671
E 1.99:ucrl-id-105671	Available