MEMs reliability [electronic resource] / Allyson Hartzell, Mark G. da Silva, Herbert R. Shea ; foreword by Stephen D. Senturia.

Successfully bringing MEMS-based products to market hinges on engineering the component to have sufficient reliability for the intended application, yet the reliability and qualification methodology for MEMS based products is not widely understood. Companies that have a deep understanding of MEMS re...

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Bibliographic Details

Online Access:	Full Text (via Springer)
Main Author:	Hartzell, Allyson L.
Other Authors:	Da Silva, Mark G., Shea, Herbert R.
Format:	Electronic eBook
Language:	English
Published:	New York ; London : Springer, 2011.
Series:	MEMS reference shelf.
Subjects:	Microelectromechanical systems > Reliability.