MEMs reliability [electronic resource] / Allyson Hartzell, Mark G. da Silva, Herbert R. Shea ; foreword by Stephen D. Senturia.
Successfully bringing MEMS-based products to market hinges on engineering the component to have sufficient reliability for the intended application, yet the reliability and qualification methodology for MEMS based products is not widely understood. Companies that have a deep understanding of MEMS re...
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Full Text (via Springer) |
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| Other Authors: | , |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
New York ; London :
Springer,
2011.
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| Series: | MEMS reference shelf.
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| Subjects: |
Table of Contents:
- Lifetime Prediction
- Failure Modes and Mechanisms: Failure Modes and Mechanisms in MEMS
- In-Use Failures
- Root Cause and Failure Analysis
- Testing and Standards for Qualification
- Continuous Improvement: Tools and Techniques for Reliability Improvement.