Introduction to microsystem design [electronic resource] / Werner Karl Schomburg.
The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important...
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| Online Access: |
Full Text (via Springer) |
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| Main Author: | |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Berlin ; Heidelberg :
Springer,
©2011.
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| Series: | RWTH edition.
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| Subjects: |
| Summary: | The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important in micro systems. For quick reference equations are presented in tables which are found in an index at the end of this book. |
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| Physical Description: | 1 online resource (xxi, 319 pages) |
| Bibliography: | Includes bibliographical references (pages 311-314) and index. |
| ISBN: | 9783642194894 3642194893 9783642194887 3642194885 |
| Source of Description, Etc. Note: | Source of description: Print version record. |