Introduction to microsystem design [electronic resource] / Werner Karl Schomburg.

The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important...

Full description

Bibliographic Details

Online Access:	Full Text (via Springer)
Main Author:	Schomburg, Werner Karl, 1955-
Format:	Electronic eBook
Language:	English
Published:	Berlin ; Heidelberg : Springer, ©2011.
Series:	RWTH edition.
Subjects:	Microelectromechanical systems > Design and construction.