Magnetic lens apparatus for use in high-resolution scanning electron microscopes and lithographic processes [electronic resource]

Multiple-array; Particular; Permanent Magnet; High-resolution; Materials; Apparatus; Focus; Piece; Sole; Scanning; Apparatus Comprise; 30; Voltage; Arranged; Magnetic; Devices; Electron Beam; Superconducting Coils; Virtual; Position; Embodiments; Brought; Magnetic Pole; Space; Particle Beams; Partic...

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Bibliographic Details

Online Access:	Online Access
Corporate Author:	Argonne National Laboratory (Researcher)
Format:	Government Document Electronic eBook
Language:	English
Published:	Argonne, Ill. : Oak Ridge, Tenn. : Argonne National Lab ; distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy, 2000.