Anisotropy-based crystalline oxide-on-semiconductor material [electronic resource]

Anisotropy-Based; Crystalline; Oxide-On-Semiconductor; Material; Semiconductor; Structure; Device; Semiconductor; Application; Utilizes; Substrate; Semiconductor-Based; Material; Silicon; Film; Crystalline; Oxide; Unit; Cells; Capable; Exhibiting; Anisotropic; Behavior; Overlying; Substrate; Surface...

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Bibliographic Details

Online Access:	Online Access
Main Authors:	Walker, Frederick Joseph (Author), McKee, Rodney Allen (Author)
Corporate Author:	Lockheed Martin Energy Research Corp (Researcher)
Format:	Government Document Electronic eBook
Language:	English
Published:	Oak Ridge, Tenn. : Oak Ridge, Tenn. : Lockheed Martin Energy Research Corp. ; distributed by the Office of Scientific and Technical Information, U.S. Department of Energy, 2000.