The Effectiveness of HCl and HF Cleaning of Si0.85Ge0.15 Surface [electronic resource]

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Bibliographic Details
Online Access:	Online Access
Corporate Author:	Stanford Linear Accelerator Center (Researcher)
Format:	Government Document Electronic eBook
Language:	English
Published:	Washington, D.C : Oak Ridge, Tenn. : United States. Dept. of Energy ; distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy, 2008.
Subjects:	Atoms. Spectra. Cleaning. Oxides. Synchrotron Radiation. Photoemission. Photoelectron Spectroscopy. Particle Accelerators.

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Call Number:	E 1.99:slac-pub-13302
E 1.99:slac-pub-13302	Available