Calibration of the modulation transfer function of surface profilometers with binary pseudo-random test standards [electronic resource] : Expanding the application range.

Surface Metrology, Surface Profilometer, Interferometric Microscope, Modulation Transfer Function, Power Spectral Density, Calibration, Error Reduction, Fabrication Tolerances, Metrology Of X-ray Optics.

Bibliographic Details

Online Access:	Online Access
Corporate Author:	Lawrence Berkeley National Laboratory (Researcher)
Format:	Government Document Electronic eBook
Language:	English
Published:	Berkeley, Calif. : Oak Ridge, Tenn. : Lawrence Berkeley National Laboratory ; distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy, 2010.
Subjects:	Algorithms. Electron Microscopes. Asymmetry. Transfer Functions. Data Processing. Calibration. Wavelengths. Modulation. Spectral Density. Optics. Microscopes.