A guide to hands-on MEMS design and prototyping [electronic resource] / Joel Kubby.

"Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fa...

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Bibliographic Details

Online Access:	Full Text (via Knovel)
Main Author:	Kubby, Joel A.
Format:	Electronic eBook
Language:	English
Published:	Cambridge, UK ; New York : Cambridge University Press, 2011.
Subjects:	Microelectromechanical systems.