Micron and submicron integrated circuit metrology [electronic resource] : August 22-23, 1985, San Diego, California / Kevin M. Monahan, chairman/editor ; cooperating organizations, Optical Sciences Center/University of Arizona, Institute of Optics/University of Rochester.

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Bibliographic Details
Online Access:	Full Text (via SPIE Digital Library)
Corporate Authors:	University of Arizona. Optical Sciences Center, University of Rochester. Institute of Optics, Society of Photo-Optical Instrumentation Engineers
Other Authors:	Monahan, Kevin M.
Format:	Electronic eBook
Language:	English
Published:	Bellingham, Wash., USA : SPIE--International Society for Optical Engineering, 1985.
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 565.
Subjects:	Integrated circuits > Measurement > Congresses. Integrated circuits > Testing > Congresses. Integrated circuits > Measurement. Integrated circuits > Testing. Conference papers and proceedings.

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Holdings details from Online
Call Number:	TK7874 .M488 1985
TK7874 .M488 1985	Available