Micron and submicron integrated circuit metrology [electronic resource] : August 22-23, 1985, San Diego, California / Kevin M. Monahan, chairman/editor ; cooperating organizations, Optical Sciences Center/University of Arizona, Institute of Optics/University of Rochester.
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| Online Access: |
Full Text (via SPIE Digital Library) |
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| Corporate Authors: | , , |
| Other Authors: | |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Bellingham, Wash., USA :
SPIE--International Society for Optical Engineering,
1985.
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| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 565. |
| Subjects: |
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