Optical microlithography and metrology for microcircuit fabrication [electronic resource] : 27-28 April 1989, Paris, France / Michel J. Lacombat, Steve Wittekoek, chairs/editors, the Congress of EPS--European Physical Society, Europtica--the European Federation for Applied Optics, SPIE--the International Society for Optical Engineering ; cooperating organizations, ANRT Association nationale de la recherche technique [and others]

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Bibliographic Details
Online Access:	Full Text (via SPIE Digital Library)
Corporate Authors:	European Physical Society, European Federation for Applied Optics, Society of Photo-Optical Instrumentation Engineers, Association nationale de la recherche technique, ECO2
Other Authors:	Lacombat, Michel J., Wittekoek, Steven
Format:	Electronic Conference Proceeding eBook
Language:	English
Published:	Bellingham, Wash., USA : SPIE, ©1989.
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 1138.
Subjects:	Integrated circuits > Design and construction > Congresses. Microlithography > Congresses. Integrated circuits > Design and construction. Microlithography. Conference papers and proceedings.

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Holdings details from Online
Call Number:	TK7874 .O67 1989
TK7874 .O67 1989	Available