Deposition of aluminum--copper alloy on laminated polyimide substrates from a RF induction source [electronic resource]

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Bibliographic Details
Online Access:	Online Access
Format:	Government Document Electronic eBook
Language:	English
Published:	Oak Ridge, Tenn. : distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy, 1979.
Subjects:	Petrochemicals. Gases. Deposition. Petroleum Products. Aluminium Base Alloys. Fabrication. Plastics. Integrated Circuits. Aluminium Alloys. Vapor Deposited Coatings. Microelectronic Circuits. Electronic Circuits. Coatings. Copper Alloys. Fluids. Vapors. Substrates. Alloys. Engineering.

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Call Number:	E 1.99: conf-790442-6
E 1.99: conf-790442-6	Available