Gate dielectrics and MOS ULSIs [electronic resource] : principles, technologies, and applications / Takashi Hori.

Gate Dielectrics and MOS ULSIs provides necessary and sufficient information for those who wish to know well and go beyond the conventional SiO2 gate dielectric. The topics particularly focus on dielectric films satisfying the superior quality needed for gate dielectrics even in large-scale integrat...

Full description

Bibliographic Details

Online Access:	Full Text (via Springer)
Main Author:	Hori, Takashi, 1956-
Format:	Electronic eBook
Language:	English
Published:	Berlin ; New York : Springer, ©1997.
Series:	Springer series in electronics and photonics ; v. 34.
Subjects:	Integrated circuits > Ultra large scale integration. Dielectric devices. Metal oxide semiconductors. Silicon-on-insulator technology.