The Physics of Submicron Lithography / by Kamil A. Valiev.

This monograph details the physics behind the methods of generating submicron forms for electron beam, ion beam, optical, and X-ray lithography. Topics are discussed at the level of analytical theory, allowing a study of scientific issues in the field without frequent reference to a general physics...

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Bibliographic Details

Online Access:	Full Text (via Springer)
Main Author:	Valiev, Kamil A.
Format:	eBook
Language:	English
Published:	Boston, MA : Springer US : Imprint : Springer, 1992.
Series:	Microdevices, Physics and Fabrication Technologies.
Subjects:	Lithography, Electron beam. X-ray lithography. Ion beam lithography. Physics.