3-Dimensional Process Simulation / edited by J. Lorenz.

Whereas two-dimensional semiconductor process simulation has achieved a certain degree of maturity, three-dimensional process simulation is a newly emerging field in which most efforts are dedicated to necessary basic developments. Research in this area is promoted by the growing demand to obtain re...

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Bibliographic Details

Online Access:	Full Text (via Springer)
Main Author:	Lorenz, J.
Format:	eBook
Language:	English
Published:	Vienna : Springer Vienna, 1995.
Subjects:	Engineering. Computer simulation. Computer-aided design. Electronics.