Isolation of components on a silicon wafer using SiO₂ / by Glenn W. Skouson.

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Bibliographic Details
Online Access:	Search for the full-text version of this title in HathiTrust
Main Author:	Skouson, Glenn W.
Corporate Authors:	United States. National Aeronautics and Space Administration, Westinghouse Electric Corporation. Defense and Space Center, Goddard Space Flight Center
Format:	Government Document Book
Language:	English
Published:	Washington, D.C. : National Aeronautics and Space Administration, 1966.
Series:	NASA contractor report ; NASA CR-580.
Subjects:	Silicon.

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Holdings details from Norlin Library - Government Information - US
Call Number:	NAS 1.26:580
NAS 1.26:580	Available Place a Hold