Automated defect spatial signature analysis for semiconductor manufacturing process [electronic resource]

Automated; Defect; Spatial; Signature; Analysis; Semiconductor; Manufacturing; Process; Apparatus; Method; Performing; Automated; Defect; Spatial; Signature; Alysis; Data; Set; Representing; Defect; Coordinates; Wafer; Processing; Information; Categorizing; Data; Data; Set; Plurality; Level; Categor...

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Bibliographic Details

Online Access:	Online Access
Main Authors:	Sari-Sarraf, Hamed (Author), Tobin, Jr., Kenneth W. (Author), Gleason, Shaun S. (Author), Karnowski, Thomas P. (Author)
Corporate Author:	Lockheed Martin Energy Systems, Inc (Researcher)
Format:	Government Document Electronic eBook
Language:	English
Published:	Oak Ridge, Tenn. : Oak Ridge, Tenn. : Lockheed Martin Energy Systems, Inc. ; distributed by the Office of Scientific and Technical Information, U.S. Department of Energy, 1999.