Optical microlithography III [electronic resource] : technology for the next decade : March 14-15, 1984, Santa Clara, California / Harry L. Stover, chairman/editor.

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Bibliographic Details
Online Access:	Full Text (via SPIE Digital Library)
Corporate Author:	Society of Photo-Optical Instrumentation Engineers
Other Authors:	Stover, Harry L.
Other title:	Optical microlithography 3. Optical microlithography three.
Format:	Electronic eBook
Language:	English
Published:	Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, ©1984.
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 470.
Subjects:	Microlithography > Congresses. Integrated circuits > Very large scale integration > Congresses. Integrated circuits > Very large scale integration. Microlithography. Conference papers and proceedings.

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Call Number:	TR940 .O69 1984
TR940 .O69 1984	Available