Scanning Probe Lithography / by Hyongsok T. Soh, Kathryn Wilder Guarini, Calvin F. Quate.

Scanning Probe Lithography (SPL) describes recent advances in the field of scanning probe lithography, a high resolution patterning technique that uses a sharp tip in close proximity to a sample to pattern nanometer-scale features on the sample. SPL is capable of patterning sub-30nm features with na...

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Bibliographic Details

Online Access:	Full Text (via Springer)
Main Author:	Soh, H. Tom
Other Authors:	Guarini, Kathryn Wilder, Quate, Calvin F.
Format:	eBook
Language:	English
Published:	Boston, MA : Springer US, 2001.
Series:	Microsystems (Series) ; v. 7.
Subjects:	Engineering. Machinery. Computer engineering. Systems engineering. Optical materials. Surfaces (Physics)