Ceramic thick films for MEMS and microdevices [electronic resource] / Robert A. Dorey.

The MEMS (Micro Electro-Mechanical Systems) market returned to growth in 2010. The total MEMS market is worth about $6.5 billion, up more than 11 percent from last year and nearly as high as its historic peak in 2007. MEMS devices are used across sectors as diverse as automotive, aerospace, medical,...

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Bibliographic Details

Online Access:	Full Text (via ScienceDirect)
Main Author:	Dorey, Robert A.
Format:	Electronic eBook
Language:	English
Published:	Norwich, N.Y. : Oxford : William Andrew ; Elsevier Science [distributor], 2011.
Series:	Micro & nano technologies.
Subjects:	Thick-film circuits > Design and construction. Microelectromechanical systems > Design and construction. Nanoelectronics.