A New Wafer-Level Packaging Technology for MEMS with Hermetic Micro-Environment. [electronic resource]

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Bibliographic Details
Online Access:	Online Access
Corporate Author:	Sandia National Laboratories (Researcher)
Format:	Government Document Electronic eBook
Language:	English
Published:	Washington, D.C. : Oak Ridge, Tenn. : United States. National Nuclear Security Administration ; distributed by the Office of Scientific and Technical Information, U.S. Department of Energy, 2011.

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Call Number:	E 1.99:sand2011-1083c
E 1.99:sand2011-1083c	Available