Fabrication of micrometer line width SAW filters using direct optical projection / W.J. Kearns, A.J. Slobodnik, Jr.

Projection printing directly on acoustic substrates using a 10X master and a high resolution 10:1 reduction lens in conjunction with the photoresist stripping technique has resulted in successful fabrication of micrometer line-width SAW filters, which are used in command, control, and communications...

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Bibliographic Details

Online Access:	Search for the full-text version of this title in HathiTrust
Main Authors:	Kearns, W. J. (Author), Slobodnik, A. J., Jr. (Andrew James) (Author)
Corporate Author:	Air Force Cambridge Research Laboratories (U.S.)
Format:	Government Document Book
Language:	English
Published:	Hanscom AFB, Massachusetts : Air Force Cambridge Research Laboratories, Air Force Systems Command, United States, 1975.
Series:	AFCRL-TR (Series) ; 75-55. Instrumentation papers ; no. 225.
Subjects:	Acoustic surface waves. Sound > Equipment and supplies.