Fabrication of micrometer line width SAW filters using direct optical projection / W.J. Kearns, A.J. Slobodnik, Jr.
Projection printing directly on acoustic substrates using a 10X master and a high resolution 10:1 reduction lens in conjunction with the photoresist stripping technique has resulted in successful fabrication of micrometer line-width SAW filters, which are used in command, control, and communications...
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| Main Authors: | , |
| Corporate Author: | |
| Format: | Government Document Book |
| Language: | English |
| Published: |
Hanscom AFB, Massachusetts :
Air Force Cambridge Research Laboratories, Air Force Systems Command, United States,
1975.
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| Series: | AFCRL-TR (Series) ;
75-55. Instrumentation papers ; no. 225. |
| Subjects: |
| Summary: | Projection printing directly on acoustic substrates using a 10X master and a high resolution 10:1 reduction lens in conjunction with the photoresist stripping technique has resulted in successful fabrication of micrometer line-width SAW filters, which are used in command, control, and communications and electronic sensing applications. This system and a typical 320 MHz (1.26 micrometer line width) SAW filter are described in detail. |
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| Item Description: | "28 January 1975." ADA008488 (http://www.dtic.mil) Microwave Physics Laboratory Project 634B. Research supported by the Air Force Cambridge Research Laboratories, Air Force Systems Command, United States Air Force, L.G. Hanscom Field, Bedford, Massachusetts. |
| Physical Description: | 12 pages : illustrations ; 28 cm. |
| Bibliography: | Includes bibliographical references (pages 11-12) |
| Action Note: | committed to retain 20230101 20480101 Alliance Shared Trust https://www.coalliance.org/shared-print-archiving-policies. |